Plenary Session

Onsite  
Date: Monday-Tuesday, June 20-21, 2022
Venue: Shanghai International Convention Center 上海国际会议中心
  No.2727 Riverside Avenue Pudong, Shanghai 200120, China 中国上海浦东滨江大道2727号
   
Virtual  
Date: June 20-July 15, 2022
Website: SEMI Cloud Platform


Distinguished Conference Keynote Speakers

Dr. Martin van den Brink
President and Chief Technology Officer
ASML
Dr. Gerald Yin
Chairman and CEO
AMEC
Dr. Donghui Lu
Vice President, Co-General Manager, HVM Program Office
Intel
Dr. Marvin Liao
Vice President, APTS
TSMC


Monday, June 20, 2022
Meeting Room: 3rd Floor Auditorium
08:30-09:00 Registration 来宾登记
   
09:00-09:40 Opening Ceremony
   
09:40-10:15 Driving Moore's Law into the Next Decade
  Dr. Martin van den Brink
  President and Chief Technology Officer, ASML
   
10:15–10:50 TBD
  Dr. Gerald Yin
  Chairman and CEO, AMEC
   
10:50–11:25 Intel Accelerated: Engineering The Future
  Dr. Donghui Lu

Vice President, Co-General Manager, HVM Program Office, Intel
   
11:25–12:00 Advanced 3D Chiplet Packaging Technology and Manufacturing
  Dr. Marvin Liao
  Vice President, APTS, TSMC


Parallel Symposium Oral Sessions

Monday, June 20, 2022
13:30-17:00 Parallel Symposium Oral Sessions
Coffee Break Conference Poster Session
   
Tuesday, June 21, 2022
8:30-18:00 Parallel Symposium Oral Sessions


Parallel Symposium Oral Sessions

Symposium I: Device Engineering and Memory Technology

Symposium II: Lithography and Patterning

Symposium III: Dry & Wet Etch and Cleaning

Symposium IV: Thin Film, Plating and Process Integration

Symposium V: CMP and Post-Polish Cleaning

Symposium VI: Metrology, Reliability and Testing

Symposium VII: Packaging and Assembly

Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies

Symposium IX: Design and Automation of Circuits and Systems


Training Course

Workforce Development Development of CMOS Integrated Process


Conference Banquet

Monday, June 20, 2022
Banquet fee

900RMB/Person
Online Registration link;
(http://semi.expotec.com.cn/Visitor/Conference.aspx?lang=en&uid=)

18:30-20:30 Conference Banquet


Hotel Floor Layout