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Sunday, March 14, 2021 Shanghai International Convention Center
Meeting Room: 5A

Session I: Materials and Archictures for Future Computing Platforms
Session Chair: Jinling Yang
13:30-13:35 Opening Remarks
*13:35-14:05 Artificial heterostructures enabled by stacking single-crystalline freestanding membranes
  Jeehwan Kim, Massachusetts Institute of Technology(MIT)
*14:05-14:35 Computation-In-Memory with Memristors for Neuromorphic Computing
  Jianshi Tang, Tsinghua University
*14:35-15:05 Van der Waals heterostructures for optoelectronic and electronic devicessamples
  Kaiyou Wang, SKLSM, Institute of Semiconductors, CAS
15:05-15:35 Coffee Break

Session II: MEMS and Biosensors
Session Chair: Jinling Yang
*15:35-16:05 Surface Redox Buffering Effects on FET Based DNA Sensors with a Gold Sensing Gate
  Zhen Zhang, Uppsala University
*16:05-16:35 Far-field optical detection of 10nm Si nanoparticle
  Stas Polonsky, Samsung, Russia
*16:35-17:05 Loss Mechanisms of Multi-frequency Whispering Gallery Mode RF-MEMS Resonators
  Jinling Yang, Institute of Semiconductors, CAS

Monday, March 15, 2021 Shanghai International Convention Center
Meeting Room: 5A

Session III: Novel Materials and Processes
Session Chair: Jinling Yang
*8:30-9:00 Polarization-Sensitive Photodetectors based on 2D Layered Semiconductors
  Zhongming Wei, Institute of Semiconductors, CAS
9:00-9:25 Non-destructive High-resolution Tomographic Cross-sectional Imaging on SuspendedStructures inside a MEMS Package
  Dai Haiwen, ZEISS Process Control Solutions, Carl Zeiss Pte Ltd
9:25-9:45 Wafer Defect Map Similarity Search Using Deep Learning in Semiconductor Manufacturing
  Sen Wang, Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.(XMC)
9:45-10:15 Coffee Break
Poster Session:
  Design of CMOS Terahertz Detector Array based on Surface Plasmon Resonance Antenna
  Haoyu Zhu, Nanjing University
  Reduction of random telegraph signal noise by optimizing deep trench isolation process for backside illuminated CMOS image
  Chunshan Zhao, Huali Microelectronics Corporation
  A MEMS Micro-tweezers for Precision Micro Fabricating and Assembly
  Zhang Hao, Microsystem & Terahertz Research Center, China Academy of Engineering Physics (CAEP), Institute of Electronic Engineering
  Design of Millimeter Wave Transceiver Isolation System Based on Polarization Converter and Grating
  Jiabing Liu, Nanjing University
  A Combination Design of 3D Depth Imaging and 2D Intensity Imaging SPAD Device
  KONG XIANGSHUN, Nanjing University
  A Study on Pixel Performance of DCG CMOS Image Sensor Through Optimizing Implant Condition
  MaoJunxia, Shanghai Huali Microelectronics Corporation