Plenary Session

Virtual  
Date: June 14-July 12, 2022
Website: SEMI Cloud (v.semi.org.cn)


Distinguished Conference Keynote Speakers

Dr. Martin van den Brink
President and Chief Technology Officer
ASML
Dr. Gerald Yin
Chairman and CEO
AMEC
Dr. Marvin Liao
Vice President, APTS
TSMC
Dr. Feng Hong
CEO
ICLeague Technology


Opening Ceremony
 
Driving Moore's Law into the Next Decade
Dr. Martin van den Brink
President and Chief Technology Officer, ASML
 
Micro-Fabrication Equipment, the Foundation of Digital Revolution and Beyond
Dr. Gerald Yin
Chairman and CEO, AMEC
 
Advanced 3D Chiplet Packaging Technology and Manufacturing
Dr. Marvin Liao
Vice President, APTS, TSMC
 
An Innovative 3D HITOC 4F2 DRAM Architecture
Dr. Feng Hong
CEO, ICLeague Technology


Symposium Sessions

Symposium I: Device Engineering and Memory Technology

Symposium II: Lithography and Patterning

Symposium III: Dry & Wet Etch and Cleaning

Symposium IV: Thin Film, Plating and Process Integration

Symposium V: CMP and Post-Polish Cleaning

Symposium VI: Metrology, Reliability and Testing

Symposium VII: Packaging and Assembly

Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies

Symposium IX: Design and Automation of Circuits and Systems


Training Course

Workforce Development Development of CMOS Integrated Process