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Session I: MEMS and Biosensors-I

Opening Remarks
Qinghuang Lin
*Bio-inspired in-sensor vision adaptation for accurate perception (9:30-10:00, June 21, Microsoft Teams Meeting)
Yang Chai, The Hong Kong Polytechnic University
*Resonant piezoelectric MEMS sensors (10:00-10:30, June 21, Microsoft Teams Meeting)
Tianxiang Nan, Tsinghua University
*A simple MEMS technique enabled PERFECT filter for various clinical applications
Wei Wang, Peking University

Session II: Materials and Archictures for Future Computing Platforms

*ICL heterogeneous system integration solution
Odd Hung, ICLeague
*From Lab to Fab: Emerging Layered Semiconductor Industrial Synthesis, Device Engineering and Related Process Development
Chen Wang, Tsinghua University
*Characterization of neuromorphic response using a conductive atomic force microscope
Mario Lanza, King Abdullah University of Science and Technology (KAUST)

Session III: Novel Materials and Processes

*Innovations of Industry IGBT technologies and products
Jianhua Liu, GTA Semiconductor
*Toward Mass Production Of Metasurfaces
Qize Zhong, Shanghai University

Session IV: MEMS and Biosensors-II

*Sensors integrated with bio materials
Tie Li, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
*AlN based piezoelectrically actuated multi-DOF MEMS micromirror
Hongbin Yu, Huazhong University of Science and Technology
Evaluation of Capacitive Humidity Sensor with Polyimide as Sensing Material
Xiaoxu Kang, Shanghai ICR&D Center
Quantum efficiency enhancement by optimizing BST design for NIR CMOS sensor
Chunshan Zhao, Shanghai Huali Integrated Circuit Corporation

Session V: New Materials and Devices

Device Modeling and Simulation of Ferroelectric Tunnel Junction for Computing-in-Memory Application
Yuyao Lu, Tsinghua University
Polarity-controllable WSe2 transistor enabled by inserting a h-BN layer
Zheng Bian, Zhejiang University
Study on small dead area high-voltage silicon PIN detectors
Tiesong Li, Peking University
Ultra-fast on-chip Sensing for PCR detection with machine learning-based image processing algorithm
Jingxuan Shen, Shanghai University

Session VI: Machine Learning and AI in IC Manufaturing

Based on Deep Learning CD-SEM Image Defect Detection System
Sen Wang, Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.(XMC)
Improving White Pixel through the Optimization of Structure and Implantation in CIS Device
Lu Wang, Shanghai Huali Microelectronics Corporation
Epitaxy equipment: For how long will China drive the market
Vishnu KUMARESAN, Yole Developpement

Poster Session:

Fabrication and Performance Research of Silicon Nanosheet Field Effect Transistor Biosensor
Enyi Xiong, North China University of Technology
Study on performance of Si3N4 enhanced microbolometer with salicided polysilicon thermistor in CMOS technology
Haolan Ma, Nanjing University
Influence of B Ions Doping on the Performance of p-type Silicon Nanowire Field Effect Transistor Biosensor
Jiawei Hu, Institute of Microelectronic of the Chinese Academy of Sciences
Investigation of FinFETs based Ion Sensitive Field Effect Transistor Sensor
Min Fang, Advanced Integrated Circuits & Center, Institute of Microelectronic of the Chinese Academy of Sciences
An SOI-based SiGe Heterojunction Phototransistor with large operation current range
Fu Zhu, Beijing University Of Technology