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1. Symposium II: Lithography and Patterning (2018)

   ...bsp; Yiyu Shi / Leo Pang **8:35-9:05 Close – loop – design and manuf...

   Basic page - 2018-04-17 11:41:56.0

2. Symposium III: Dry &Wet Etch and Cleaning (2018)

   ...ssion Chair: Tom Ni (AMEC) 8:45-9:00 The Study of STI Etching Micro-...

   Basic page - 2018-04-17 11:42:43.0

3. Symposium IV: Thin Film, Plating and Process Integration (2018)

   ...16:20 Patterning Challenges in 193i-based Tip to Tip in N5 Interconn...

   Basic page - 2018-04-17 11:43:37.0

4. Symposium V: CMP and Post-Polish Cleaning (2018)

   ...sion Chair: Jin-Goo Park **8:30-9:00 CMP Challenges for Interconnect...

   Basic page - 2018-04-17 11:45:51.0

5. Symposium VI: Metrology, Reliability and Testing (2018)

   ...n Li, GLOBALFOUNDRIES, USA 8:55–9:10 The Detection and Investigation...

   Basic page - 2018-04-17 11:46:46.0

6. Symposium VII: Packaging and Assembly (2018)

   ...aging   YB Lin, JCET *8:55-9:20 Polyimide applications and deve...

   Basic page - 2018-04-17 11:47:34.0

7. Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies (2018)

   ...hnology, Hong Kong, China *8:55-9:20 The development of micro-machin...

   Basic page - 2018-04-17 11:48:28.0

8. Symposium IX: Design and Automation of Circuits and Systems (2018)

   ...bsp; Yiyu Shi / Leo Pang **8:35-9:05 Close – loop – design and manuf...

   Basic page - 2018-04-17 11:49:26.0

9. Prof. Yayi Wei

   ...e to his great contribution to 193nm immersion lithography, he was i...

   Basic page - 2023-02-16 14:58:08.0

10. Dr. Chao-Chang Arthur Chen

    ... of Wisconsin, Madison, USA in 1991 and 1994, respectively. As Chair...

    Basic page - 2018-05-07 16:24:08.0