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English

June 27-29, 2020
Shanghai New International Expo Centre

Keynote & Invited Speakers (2017)

Keynote & Invited Speakers(2017)

Plenary Session

Prof. Hiroshi Amano, Director, Center for Integrated Research of Future Electronics, Institute of Materials and Systems for Sustainability, Nagoya University

Dr. Tzu-Yin Chiu, CEO and Executive Director, Semiconductor Manufacturing International Corp. (SMIC)

Dr. Ho-Kyu Kang, Executive Vice President Process Development of Semiconductor R&D Center, Sansung Electronics Co,LTD,Korea

Prof. Rao Tummala, Joseph.M Pettit Chair Professor in ECE and MSE, Director, 3D Microsystems Packaging Research Center, Georgia Research Alliance Eminent Scholar, Georgia Institute of Technology, Atlanta, Ga, USA

Confirmed Invited Speakers

** Keynote Speech * Invited Speech

Symposium I: Device Engineering and Memory Technology

Symposium II: Lithography and Patterning

Symposium III: Dry &Wet Etch and Cleaning

Symposium IV: Thin Film, Plating and Process Integration

Symposium V: CMP and Post-Polish Cleaning

Symposium VI: Metrology, Reliability and Testing

Symposium VII: Packaging and Assembly

Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies

Symposium IX: Circuit Design, Systems and Applications