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Boyu Dong 董博宇 Vice president&CVD Business Unit General Manager, Beijing NAURA Microelectronics Equipment Co.,Ltd 副总裁兼CVD事业部总经理，北京北方华创微电子装备有限公司 |
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个人简介 / Biography Education: Doctor of Engineering of Fukui University Experience: Sea Poly Project of Beijing Overseas Talents in 2013 Awarded Beijing Capital Labor medal Published more than 40 papers Owner of more than 40 patents In charge of the development of AlN hetero expitaxy equipment, achieve market share of 90% 摘要 / Abstract The technical solutions provided by NAURA in Si epitaxy and SiC materials for discrete devices and MEMS are described. Otherwise,the technology accumulation and performance advantage of NAURA in Si epitaxy equipment, SiC epitaxy equipment and SiC crystal growth system are introduced. |
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