Boyu Dong 董博宇
Vice president&CVD Business Unit General Manager, Beijing NAURA Microelectronics Equipment Co.,Ltd

个人简介 / Biography

Doctor of Engineering of Fukui University
Sea Poly Project of Beijing Overseas Talents in 2013
Awarded Beijing Capital Labor medal
Published more than 40 papers
Owner of more than 40 patents
In charge of the development of AlN hetero expitaxy equipment, achieve market share of 90%

摘要 / Abstract

The technical solutions provided by NAURA in Si epitaxy and SiC materials for discrete devices and MEMS are described. Otherwise,the technology accumulation and performance advantage of NAURA in Si epitaxy equipment, SiC epitaxy equipment and SiC crystal growth system are introduced.