为了您获得更好的浏览体验,请将您的浏览器更新到最新版本!
+86.21.6027.8500
Chinese
2020年6月27-29日
上海新国际博览中心

Hidetami Yaegashi


Hidetami Yaegashi
Senior Manager
Tokyo Electron Limited(TEL), Japan


Hidetami Yaegashi is a Senior member of technical staff in Tokyo Electron, and has been working on several aspect of lithography and micro-patterning for over 30 years. He is currently a senior manager of patterning process development in corporate R&D, and have been pursuing integrated patterning solution with 193 immersion ,EUV, resist track, deposition and etching process. He received 2012 best paper award in SPIE Advanced Lithography.