Dr. Chao Zhao
SAMT, China

Dr. Zhao was a research professor in IMECAS (Institute of Microelectronics of Chinese Academy of Science) and a Deputy Director of Integrated Circuit Advanced Process Center of IMECAS. In 1982, he graduated from Physics Department of Nanjing University in China with a Bachelor Degree. He received a master degree from University of Industry of Harbin in Semiconductor in 1988 and a PHD degree from Katholieke University of Leuven in Belgium in 1999. From 2000 to 2010, he was working as a senior scientist in IMEC. In his professional career, he has worked in different fields including semiconductor sensors, advanced ceramics materials and microelectronics. During his work in IMEC, his research experience covers both FEOL and BEOL processing technologies in 8-inch and 12 inch pilot lines, mainly focusing on high-k and metal gate, Cu contacts, Cu interconnection etc. He has authored and co-authored 130 scientific papers and is the inventor of 16 patents in IC processing technology.