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Dr. XU Kaidong 许开东 Jiangsu Leuven Instruments Co., Ltd. Chairman of the Board & CEO 江苏鲁汶仪器股份有限公司，董事长兼CEO |
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讲师简介 / Speaker Bio 许开东博士，现任鲁汶仪器董事长兼CEO。于比利时鲁汶大学获得化学博士学位。2004年至2010年，任泛林半导体资深研发经理；2010年至2015年，任比利时欧洲微电子研究中心等离子刻蚀部门研发主管、经理；2015年至今，任鲁汶仪器董事长兼CEO。拥有国内外发明专利100余项，在国际期刊、会议发表学术论文100余篇。 摘要 / Abstract To build a more intelligent, automated, healthy and cleaner environment to live in, power device becomes the core for current and future economy with systems that operate over a broad spectrum of power levels and frequencies, especially compound semiconductor power device. Various compound semiconductor devices fabrication demands more advanced and well developed dry etch and deposition processing to realize its physical architecture and then the desired performance. In this talk the speaker will report the challenges and development of integrated etch and deposition solutions which enable compound semiconductor power devices high volume manufacturing. |
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