Dr. Jianping Zhao

Senior Member of Technical Staff
Senior staff scientist
University of Texas at Austin

Jianping Zhao is a Senior Member of Technical Staff in Tokyo Electron and senior staff scientist in University of Texas at Austin. As a project manager, he is leading the development of CCP plasma source focusing on active control of plasma uniformity and understanding plasma-surface interactions. He has led various microwave plasma source development for etch applications from 22 to 3nm nodes and microwave CVD and ALD applications. He invented several plasma hardware that are widely used in production in major IC makers that helps TEL wining the business breakthrough in FEOL market. His research, for the first time, differentiated microwave plasma and ICP. He also held several academic positions including research associate professor, STA Fellow, visiting professor in universities and national labs.

Jianping holds 141 U.S. and world patents and has 73 journal publications including Phys. Rev. E and Phys. Rev. B and invited review papers that have been cited more than 800 times. He has given many invited talks and his research has been highlighted on newspaper and magazine. He has served as a peer review for 6 journals for more than 20 years. Jianping received a Ph.D. in materials physics in 1997 with an Extraordinary Presidential Award.