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1. Symposium II: Lithography and Patterning (2018)

   ...mbedded Barrier Layer (EBL) for 193nm Immersion Lithography   Co...

   Basic page - 2018-04-17 11:41:56.0

2. Symposium IV: Thin Film, Plating and Process Integration (2018)

   ...-16:20 Patterning Challenges in 193i-based Tip to Tip in N5 Interconn...

   Basic page - 2018-04-17 11:43:37.0

3. Prof. Yayi Wei

   ...ue to his great contribution to 193nm immersion lithography, he was i...

   Basic page - 2023-02-16 14:58:08.0

4. Dr. Chao-Chang Arthur Chen

   ...y of Wisconsin, Madison, USA in 1991 and 1994, respectively. As Chair...

   Basic page - 2018-05-07 16:24:08.0

5. Prof. Yu Cao

   ...ysics from Peking University in 1996. He received the Ph.D. degree in...

   Basic page - 2020-12-29 12:49:54.0

6. Prof. Peide Ye

   ...esearch, Stuttgart, Germany, in 1996. Before joining Purdue faculty i...

   Basic page - 2018-10-09 13:57:47.0

7. Tomoki Suemasa

   ...uipment Co. Ltd. Tomoki Suemasa 1980; B.S. degree from Niigata Univer...

   Basic page - 2024-12-04 15:27:32.0

8. Dr. Meng-Fan (Marvin) Chang

   ...cuits Society Circuits (SSCS, 2019-2020) and System Society (CASS, 20...

   Basic page - 2024-12-04 15:31:40.0

9. Shijun Li

   ...ogy Corporation Biography 李时俊先生，1963年出生，工商管理学硕士，研究员级高级工程师。曾任职于电子工业部第四...

   Basic page - 2018-05-08 16:06:36.0

10. Dr. Koukou Suu

    ...rom Tohoku University, Japan in 1988 and 1993 respectively. He joined...

    Basic page - 2018-11-30 16:08:39.0