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Shawming Ma is currently Deputy General Manager, Plasma Product Group of Mattson Technology. He has over 25 years of experience in semiconductor technology, device, reliability and equipment development. Prior to Mattson Technology, he served as Technology Director at Maxim Integrated and Applied Materials. He is a world class expertise in plasma induced damage and plasma processes/equipment development. Shawming graduated from Stanford University with a Ph.D. degree major in Materials Science and Engineering and minor in Electrical Engineering with double Masters in both fields. He has 22 US patent, 60 Refereed journal and conference papers and 90 Symposia or company internal conference presentations.
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