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Chinese
2020年6月27-29日
上海新国际博览中心

Dr. Ye Feng

Dr. Ye Feng
Technical Director, Lam Research


Ye Feng is currently a technical director of Lam Research, responsible for machine-learning algorithm development in advanced equipment and process control. He has been working in optical simulations, algorithms, and metrology applications for 17 years and invented optical scatterometry solutions for logic nodes from 90nm down to 7nm. He holds 5 US patents. Prior to joining Lam, he was senior director of engineering and key account applications at Nanometrics.