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+86.21.6027.8500
Chinese
2020年6月27-29日
上海新国际博览中心

Dr. Huamao LIN

Dr. Huamao LIN

Senior Director, SITRI


Dr. Huamao LIN, received M.Sc. degree in Electrical Engineering from National University of Singapore and Ph.D. degree in Microelectronics from the University of Edinburgh (U.K.). He is currently Senior Director of Advanced Acoustics Group of SITRI, responsible for establishing a new AlN-based MEMS fabrication platform. He is also in charge of the new process development and process integration for advanced MEMS devices.

Dr. Lin, who has published more than 40 technical papers, has extensive experience in process module development and device integration. He is interested in developing new schemes for CMOS-MEMS integration, novel etch, clean, thin film, CMP and wafer bonding techniques for the fabrication of MEMS devices.