Dr. Kan CHEN
Senior Product Marketing Manager
KLA-Tencor Corporation


Dr. Kan CHEN currently serves as Senior Product Marketing Manager at KLA-Tencor Corporation, where he is responsible for foundry process inflection analysis, inspection roadmap definition, product lifecycle management, and yield collaboration with key foundry partners. During his tenure, Dr. CHEN has participated and led the company’s introduction of Laser Scattering Pattern Wafer Inspection products.

With over 10-year of experience in the semiconductor capital equipment industry, focusing process control, Dr. CHEN has close collaboration with leading IC manufactures on defect inspection and yield management. He has a successful track record of leading tactical force at advanced foundries for key technology inflection to achieve fast yield ramping. For his contribution, Dr. CHEN has received 12 KLA-Tencor achievement awards. Dr. CHEN has developed effective best-know-methods to address yield and cost challenges associated with advanced design rule. He has contributed more than 20 peer-review publications and technical papers, covering optics, defect inspection, and yield management.

Kan Chen received his bachelor’s degree in Physics from Nanjing University, and his Ph.D. degree in Electrical Engineering from the Pennsylvania State University.