|
Yiran Liu is a Senior Technical Manager for Process Simulation at Shanghai Institute of IC Materials. She graduated from National University of Singapore and specializes in materials and process modeling for semiconductor manufacturing. Her research focuses on data- and model-driven approaches to semiconductor manufacturing processing. She has led or played key roles in multiple research and industrial projects, with her modeling methods and process-design solutions applied by leading semiconductor materials manufacturers in China. She has authored several journal and conference publications, including papers in IEEE Transactions on Semiconductor Manufacturing. Her work has also generated multiple patented technologies related to CMP, double-sided polishing, and ALD, several of which have been transferred to industrial applications.
|