|
Zhigang Wang
Professor
|
|
Prof. Quan-Zhi Zhang has been long working on low-temperature plasma (LTP) technologies. His research spans LTP physics and chemistry, with development of 1D/2D/3D PIC/MCC, DSMC and etching models. He investigates electromagnetic effects, heating mechanisms, transport effects and surface mechanisms in RF discharges, magnetron sputtering, thin-film deposition and cryogenic plasma etching. Based on these topics, he has published over 100 research articles in scientific journals. |
|
