|
Yuping Ren, graduated from NanYang Technological University (Physics PHD Degree) at 2007 with 19 years etching process experience. He published more than 10 research papers (plasma related) and more than 20 patents (etching process related). Currently, he is a managing director in charge of ICP process development from AMEC. AMEC process technical group successfully qualified NAND critical layers (Staircase etch process and High Aspect Ratio Carbon Mask etch process) under his leadership. He is helping to qualify local etch equipment for advanced logic and DRAM process.
|
