Tao YANG 杨涛
Department Manager of New Eastech Technology Co.,Ltd.
研发经理，新毅东科技股份有限公司

讲师简介 / Speaker Bio

Yang Tao is a seasoned expert with over ten years of experience in the semiconductor manufacturing industry, specializing in R&D and equipment design. He has contributed to dozens of critical process technology initiatives. With more than seven years of focused expertise in coater/developer equipment, he has led the full-cycle development and iteration of three equipment generations. Proficient in the entire workflow from requirements analysis to mass production, he is dedicated to technological innovation that enhances equipment stability and broadens process windows, thereby enabling breakthroughs in advanced semiconductor nodes.

摘要 / Abstract

BNE自研的涂胶显影设备，深度集成了AI视觉检测算法，在工艺进行中监测关键参数，并进行智能判级。该技术将涂胶显影工艺中的“事后抽检”转变为“全程感知”，形成从精准执行、实时诊断到数据优化决策的智能检测机制。