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Dr. Xiaojing Su is an associate professor at the Institute of Microelectronics of the Chinese Academy of Sciences (IMECAS). Her research focuses on computational lithography and design-technology co-optimization (DTCO). She has been selected for the Beijing high-level innovation and entrepreneurship talent program. She has presided over one General Program and one Youth Program of the National Natural Science Foundation of China. Her work has achieved key breakthroughs in perturbation analysis for multiple patterning and defect pattern localization, applied in 14nm and more advanced node chips. She has published over 60 research papers and has applied for more than 40 patents, of which 10 have been granted.
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