Sun Lifei 孙丽妃 博士
Equipment Intelligence Specialist & Project Manager
设备智能专家及项目经理, 泛林集团

讲师简介 / Speaker Bio

With the rapid advancement of artificial intelligence, machine learning, and robotics, the semiconductor industry is accelerating its transition toward intelligent and digitalized manufacturing. As a global leader in semiconductor equipment, Lam Research has spent decades developing intelligent technologies and solutions. Equipped with self aware, self maintained, self adaptive, and self developing capabilities, Equipment Intelligence® plays a pivotal role in enabling real‑time decision‑making and adaptive control.

摘要 / Abstract

Dr. Lifei Sun conducted research on the Stability of Two-dimensional Transition Metal Dichalcogenides and Their Electronic Devices in the Department of Chemistry at Tsinghua University from 2013 to 2018, where she received her Ph.D. in Physical Chemistry. She joined Lam Research in July 2018 and have since been engaged in the etching process development, Equipment Intelligent application, and virtual simulation. Published over 20 academic papers in international journals and conferences. In 2024 and 2025, she was awarded the Best Young Engineer Paper at CSTIC two times. Currently, Dr. Sun Lifei is the Equipment Intelligence Specialist and Project Manager at Lam Research.

This presentation will introduce Lam’s integrated Equipment Intelligence® capabilities, highlighting how embedded models, advanced sensors, and data‑driven algorithms work together to accelerate process development, enhance tool health, and improve productivity performance. We will also highlight our new smart functions, showing how they serve as the core features of our Equipment Intelligence® for smart manufacturing and drive a unified path toward the Fab of the Future. By strengthening the synergy between equipment‑level insights and fab‑level optimization, Equipment Intelligence® is shaping a more autonomous, efficient, and scalable manufacturing paradigm for the next generation of semiconductor fabs.