Dr. Ni serves as VP & Etch Product Business Group DGM in AMEC. He manages and conducts the research projects for the development of Primo D-RIE system and Primo AD-RIE which can be used for the leading edge dielectric etch applications. His main focus is currently on process chamber technology, Plasma source and plasma physics and chemistry.
Prior to joining AMEC, he was a principal technologist in New Product Division of Lam Research Corp. He was the co-inventor of Lam 2300 series etch products.
Dr. Ni received his bachelor degree from University of Science and Technology of China. He received his Ph.D. in Chemistry from University of Texas at Dallas. He holds more than 40 patents in the field of semiconductor processing apparatus and authored or coauthored numerous publications. |
