Dr. Yiping Xu | |
Yiping Xu is with Raintree Scientific Instruments Corporation as Sr. Vice President and CTO. He was a Technical Director of Brion Technologyies (An ASML Company) and managed IPs for computational lithography including mask verification and OPC design technologies. Prior to that, he was a principal research scientist with KLA-Tencor, where he focused on developing advanced technologies for overlay and critical dimension (CD) metrology as well as mask and wafer defect inspection for process control in semiconductor manufacturing. He was the principal inventor of KLA-Tencor’s Optical scatterometry product (OCD) which has been widely used as a main viable metrology tool for current and future generations of IC manufacturing. He also was a Sr. Research Engineer and project manager of Veeco Instruments (WYKO Corporation), developed technologies for non-contact optical 3D surface profilers using phase-shifting interferometry (PSI) and white-light interferometry (WLI). |