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Dr. Wei Fang is senior director of ASML and head of algorithm application development of HMI. He joined Hermes Microvision Inc from 2001 and having more than eighteen years e-beam inspection development experience.
Dr. Wei Fang received BSEE and Phd degree from Tsinghua University on 1989 and 1994. Before he joined HMI, he had 5 year research fellow experience at Nanyang Technological university in Singapore. In HMI, he led image algorithm team to develop e-beam inspection algorithm. Specially he bring D2DB inspection technology into e-beam inspection system which changed e-beam inspection marketing. Currently he worked as head of advanced algorithm and technology in HMI to lead e-beam inspection into a new era. Dr. Fang has over 50 US patents and over 20 publications on e-beam inspection system, algorithm and SEM metrology area.
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