Dr. Tom Ni

CTO & Etch Product Business Group GM, Advanced Micro-Fabrication Equipment Inc. (AMEC)

Dr. Ni serves as CTO & Etch Product Business Group GM in AMEC. He manages and conducts the research projects for the development of Primo D-RIE and Primo AD-RIE dielectric etch systems and Nanova conductor etch system. These products have been used for the leading edge etch applications. His main focus is currently on process chamber technology, Plasma source and plasma physics and chemistry.
Prior to joining AMEC, he was a principal technologist in New Product Division of Lam Research Corp. Dr. Ni received his bachelor degree from University of Science and Technology of China. He received his Ph.D. in Chemistry from University of Texas at Dallas. He holds more than 40 US patents in the field of semiconductor processing apparatus and authored or coauthored numerous publications.