Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies

Symposium Committee

Dr. Qinghuang Lin
Lam Research Corporation, USA
Prof. Jianshi Tang
Tsinghua University, China
Prof. Hyungjun KIM
Yonsei University, South Korea
Dr. Hsiang-Lang Lung
Macronix International Ltd.
Dr. Zhiyong Ma
Prof. Jingwei Bai
Tsinghua University, China
Prof. Edward Y. CHANG
National Chiao Tung University, Taiwan, China
Dr. Kangguo Cheng
Prof. Jinn P. CHU
National Taiwan University of Science and Technology, Taiwan, China
Prof. Thomas Otto
Fraunhofer Institute for Electronic Nano Systems ENAS, Chemnitz, Germany
Prof. Zheyao Wang
Tsinghua University, China
Prof. Daniele Ielmini
Politecnico Di Milano, Milano, Italy
Prof. Wei Wang
Institute of Microelectronics, Peking University, China
Prof. Fuhua Yang
Institute of Semiconductor, Chinese Academy of Sciences, China
Dr. Wang Yueh
Intel, USA
Prof. Zhen Zhang
Uppsala University, Sweden
Dr. Chang CHEN
SIMIT, China
Mr. Allen Liu
IMEC, Belgium
Dr. Alex Gu
Shanghai University and SITRI, China
Dr. Chen Wang
Tsinghua University, China

Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies

•  Post-CMOS device and system options
 - Non-Von Neumann computing architecture and hardware
 - Quantum computing
 - Growth, assembly and device / system demonstration of carbon nanotubes, graphene, 2D dimensional materials
 - Spintronics, Molecular electronics, Single electron transistors, Quantum dots
 - Simulation and modeling of post-CMOS devices
 - Other novel device concepts and demonstration

•  Photonics, future interconnects, optoelectronic devices
 - Si photonics, nanophotonics, optical interconnects
 - Novel interconnect concepts, such as photo-patternable low-k and nanoimprint of interconnect structures
 - Optoelectronic al materials and devices

•  Organic and plastic semiconductors, flexible electronics
 - Synthesis and device demonstration of novel organic semiconducting materials
 - Organic electronics for RFID, LED, memory, display, photovoltaic
 - Low-cost processing of organic electronics, such as solution processing and roll-to-roll processing

•  Other applications of semiconductor devices and processes
 - Energy generation, conversation and storage devices and systems, such as solar cells, battery technology, supercapacitors
 - Sensors
 - LEDs
 - Micro-fluidics and biomedical devices
 - Bio-chips

•  Environmentally-friendly and energy-efficient semiconductor manufacturing

•  MEMS Systems and Sensor Network
 - Market and technology trends of MEMS and sensor network
 - System integration of MEMS devices and sensors
 - Heterogeneous integration of MEMS and sensor components with processors and memory
 - Sensor networks
 - Wearable systems for healthcare, fitness and wellness and infotainment
 - Internet of Things
 - Atmospheric Particulate Matter (PM) Monitoring Systems
 - MEMS and sensor data storage, processing and communication, including security and privacy
 - Applications of cloud technology in MEMS and sensors

•  MEMS and Sensor Design

•  Wearables
 - Blood Pressure Monitors
 - Drug Delivery Devices
 - Electronic Patches
 - Fitness & Heart Rate Monitors
 - Glucose Monitors
 - Smart Eyewear (Contact Lens and Glasses)
 - Smart Watches

•  MEMS Devices and Sensors
 - Accelerometers, Gyroscopes, Microactuators
 - Atmospheric Particulate Matter Sensors
 - Chemical and biological sensors
 - CMOS image sensors
 - Humidity & temperature sensors
 - Inkjets
 - Microfluidics
 - Microphones, Compasses, Micromirrors
 - Pressure sensors
 - Radio Frequency Identification (RFID)
 - RF-MEMS, Optical MEMS

•  Materials and Process technologies
 - Thin films, III-V compound semiconductors
 - New functional materials
 - Patterning materials
 - Lithography and new patterning processes
 - Deep reactive ion etching
 - Wet etch, plating and CMP
 - Novel materials and processes

•  Emerging MEMS Devices and Sensors
 - MEMS-based post-CMOS devices
 - Organic MEMS and BioMEMS
 - MEMS for DNA sequencing
 - MEMS for drug delivery
 - MEMS and sensor devices for energy harvesting, storage and delivery
 - Detection and monitoring of water quality, environment and safety

•  Packaging, Testing and Reliability of MEMS Devices and Sensors

•  Applications of MEMS Devices and Sensors
 - Automotive
 - Smart phones
 - Handheld gaming devices and consoles
 - Chemical and biomedical applications
 - Healthcare and wellness
 - Sensor network
 - Applications of MENS and sensors in energy, environment and safety