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Chinese
2020年6月27-29日
上海新国际博览中心

Dr. Kaidong Xu

Dr. Kaidong Xu
CEO, Leuven Instruments

Dr. Xu serves as CEO at Leuven Instruments. He leads the research projects for the development of LMEC etch systems, which are mainly used for metal etch, especially in MRAM etch. His research focus is on process technology, ion beam etch technology and plasma physics.
Prior to joining Leuven Instruments, he was responsible for plasma etch research and development at imec. Prior to that, he was a senior manager of process development at Lam Research. Dr. Xu received his bachelor degree in Chemistry from Peking University, China. He received his Ph.D. in Chemistry from University of Leuven, Belgium. He holds more than 40 patents and has published ~100 academic papers in international journals and conferences.