Ms. Yan Sun

Process Director of Vertical furnace BU,
Beijing NAURA Microelectronics Co., Ltd.

Yan Sun ([email protected]) now works as process director of Vertical furnace BU in Beijing NAURA Microelectronics Co., Ltd. She has been working over 20 years on semiconductor process development about furnace tools’ applications. With the experience in long-term thermal oxidation and CVD process evaluation, she has accumulated a lot of practical experience, especially for various defect issues identified during process qualification. By combining the mechanism analysis with in-depth understanding of tool configuration, she contributed to continuous furnace tools’ performance improvement and process parameter optimization. And offer better technical solutions for fabs in China, from process startup to new process qualification.