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Xiuguo Chen received his PhD degree in Mechanical Engineering from Huazhong University of Science and Technology (HUST) in 2013. From 2013 to 2015, he was working as a Postdoc at the School of Mechanical Science and Engineering in the same university. From 2016 to 2018, he was working a JSPS fellow at the Department of Nanomechanics, Tohoku University (Sendai, Japan). In 2016, he joint HUST as an assistant professor, and is now a professor at HUST. He has authored/co-authored more than 80 peer-reviewed journal papers and held more than 30 patents. His research interests include ellipsometry and polarimetry as well as scatterometry for nanoscale characterization and metrology.
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