Dr. Zheyao Wang
Tsinghua University, China

Zheyao Wang is a full professor at the Institute of Microelectronics, Tsinghua University. His research interests include microsensors, three-dimensional interconnects and integration, and MEMS. He has published more than 60 peer-reviewed journal and conference papers, and hold 12 patents. He serves as a technical program committee member for IEEE Sensors Conference since 2008, and for CSTIC 2011. He worked at DIMES, Delft University of Technology, Delft, the Netherlands, as a postdoctoral researcher with focus on microfabrication technologies for 3D integration from 2002 to 2003. He received the B.S. degree in mechanical engineering in 1995, and Ph.D. degree in mechatronics in 2000, both from Tsinghua University, Beijing, China.