Shiyuan Liu
Huazhong University of Science and Technology , CHINA

Shiyuan Liu received his PhD in Mechanical Engineering from Huazhong University of Science and Technology (HUST), Wuhan, China in 1998, and worked as a Visiting Scholar at University of Manchester, UK, from 2000 to 2001. Then he served as a Director of Control Engineering Department at National Lithography Tool Research and Development Center in Shanghai from 2002 to 2005. He has become a Professor of Mechanical Engineering at HUST since 2005, and currently is leading his Nanoscale and Optical Metrology (NOM) Group with research interest in metrology and instrumentation for nanomanufacturing. He also actively works in the area of optical lithography, including partially coherent imaging, optical proximity correction, inverse mask synthesis, and lens aberration characterization. Prof. Liu is a member of OSA, SPIE, AVS, and IEEE, and serves as a reviewer for many international journals such as OSA journals Optics Letters and Optics Express. He holds 32 patents and has authored or co-authored more than 100 technical papers.