Dr. XU Kaidong 许开东
Jiangsu Leuven Instruments Co., Ltd. Chairman of the Board & CEO

讲师简介 / Speaker Bio


摘要 / Abstract

To build a more intelligent, automated, healthy and cleaner environment to live in, power device becomes the core for current and future economy with systems that operate over a broad spectrum of power levels and frequencies, especially compound semiconductor power device. Various compound semiconductor devices fabrication demands more advanced and well developed dry etch and deposition processing to realize its physical architecture and then the desired performance. In this talk the speaker will report the challenges and development of integrated etch and deposition solutions which enable compound semiconductor power devices high volume manufacturing.