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Sikun Li received his PhD degree in optical engineering from Sichuan University, China, in 2011. After graduation, he joined Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences. He is currently an associated professor in Laboratory of Information Optics and Opto-Electronic Technology. His research interests include computational lithography for DUV/EUV lithography and metrology. He has published more than 80 papers and 2 books, and got 38 granted patents in these domains. He has undertaken and participated in a series of projects from MOST, such as projects from National Science and Technology Major Project of China.
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