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Large Batch Etching within HBLED for maximizing throughput and yield in order to minimize Cost of Ownership
先进现场检测系统提升LED制造良率


Mark Dineen, Product Manager (HBLED), Oxford Instruments Plasma Technology
Mark Dineen,产品经理(HB-LED),牛津仪器等离子技术


Biography

Dr Mark Dineen is a Product Manager within Oxford Instruments Plasma Technology, specializing in the HBLED market. He graduated from Cardiff University with a PhD on plasma etching of Gallium Nitride and started working within Oxford Instruments as an Applications Engineer in 2000. Working on etching of III-V materials then, with the growing HBLED industry, focusing on Gallium Nitride, Sapphire and other HBLED related material he has a wealth of experience related to HBLED manufacturing. Oxford Instruments has sold over 400 systems for HBLED manufacturing and supplies and develops the latest technology to enable the Solid State Lighting revolution.

Abstract

The HBLED industry justifiably demands high yield high throughput, device quality and lower cost of ownership. The PlasmaPro1000-Astrea large batch etch system provide hits these targets.
Oxford Instruments Plasma Technology has been the world leading supplier of high volume batch plasma tools in the production market for over 15 years, with a wide installed base of HBLED production systems in operation. As the industry continues to grow, we have the technology and expertise to offer the most up to date solutions to our customers.
Building on our extensive knowledge the latest batch etch system brings high rate, highly uniform etching to your facility. Designed specifically for the harsh chemistries required for HBLED materials and with uptime and ease of serviceability in mind.
The system is targeted at PSS, GaN and AlGaInP etching with batch sizes of 55 x 2”, 14 x 4”, 7 x 6” and
3 x 8”.




 

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