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Dr. Bernd Heinz 技术负责人，Evatec AG |
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个人简介 Its strongly enhanced piezoelectric response makes aluminium scandium nitride (Al1-xScxN) a very promising candidate for the fabrication of next generation RF filters, sensors, actuators and energy harvesting devices. While Al1-xScxN films with low Sc concentration (x<10) can already be produced in high volume using existing AlN sputter process technology, a volume production solution with similar productivity for films with high Sc concentration (x> 25) has not been available so far. The R&D setup for the development of dedicated processes allows for seamless transition into high volume manufacturing due to our modular approach avoid excessive costs for iterative target consumption. This presentation describes the solutions from Evatec Ltd. for both the development and high volume manufacturing using a two-fold approach. While co-sputtering using our multisource allows for tuning of the Sc-content to your specific optimum, the single target sputtering then enables sputtering at significant rates > 1nm/s. The influence of the process parameters and substrate properties on the film crystallinity, the surface structure and the piezoelectric properties will be discussed. Maurus Tschirky is Senior Manager Product Marketing, responsible globally for the market segments MEMS and Photonics in terms of strategy and strategic project and customer acquisition. Within the MEMS market segment, he has a particular interest in advanced functional materials such as piezoelectric and magnetic materials. He has held a number of positions in the PVD-equipment industry (Balzers, Unaxis, Oerlikon and most recently Evatec) within application and system engineering, project and product management. As Business Development Manager at ACUTRONIC he facilitated their Inertial Testing Service for MEMS and prior to joining Evatec in 2016, he spent 3 years leading a research section at CSEM in Neuchatel, Switzerland. He holds a first degree as Engineer in Control Electronics from the University of Applied Sciences in Buchs, and a Masters in Business Engineering / International Marketing from the Hochschule für Wirtschaft und Technik in Zurich, Switzerland awarded in 2009. |
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