SEMICON China - 同期研讨会/活动 - CSTIC 2013

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Symposium X: Advances in MEMS and Sensor Technologies

Symposium Chairs:

Qinghuang Lin		Chairman,IBM, USA
Satya Nitta		Manager, Research Straff Member, IBM T.J.Watson Research Center, USA
Herb Huang		Director,SMIC,China
Zhiyong Li		Principle Scientist,Hewlett-Packard Laboratories,USA
Zheyao Wang		Professor,Tsinghua University,China
Haizhou Yin		Professor,IME,CAS,China

(** to designate keynote talk, * to designate invite talk)

Sunday, March 18, 2012 Function Room 4

Session I: MEMS and Sensor Systems
Session Chairs: Qinghuang Lin, Hans Zappe

13:30-13:35	Chair's Opening Remark

**13:35-14:05	Internet of Things
	Xiaowei Shen, IBM Research, China/USA

**14:05-14:35	How iNEMOs and High Performance Digital Microphones Will Enable New Generation Smart Handheld Devices
	Andrea Onetti, Senior Director of Audio & Sound Business Unit, STMicroelectronics, Italy
14:35-14:50	New Dynamics of the MEMS Inertial Sensor Market
	Wenbin Ding,YOLE DEVELOPPEMENT, France
14:50-15:05	MEMS Technology and Market Trends – Change of Supply Chain and Business Models, focus on MEMS Microphone
	Wenbin Ding,YOLE DEVELOPPEMENT, France
15:05-15:20	Coffee Break
Session II: MEMS Integration Session chairs: Satya Nitta, Liwei Lin
**15: 20-15:50	MEMS Packaging Challenges and Opportunities Liwei Lin, UC Berkeley, USA
		Horst Theuss,Infineon Technologies
*15: 50-16:15	Packaging for MEMS and Sensors - Challenges and Opportunities Horst Theuss, Infineon Technologies, Germany

*16: 15-16:40	3D Integration using TSV technology
	M. Juergen Wolf, Fraunhofer IZM, Germany
*16:40-17:05	Advance and Promise of CMOS-MEMS Manufacturing of Smaller Form Factor, Lower Power and Lower Cost MEMS
	Herb Huang, SMIC, China

Poster Session:

17:00-18:30	Fabrication of Thin Silicon PIN Detector Xianshan Dong, Master, Peking University, China Analysis and Optimization of GMR Based Current Sensors with Identical Pinning Orientation Ma Weichao, Master candidate, Tsinghua University, China Study on Infrared Absorption Characteristics of Ti and TiNx Nanofilms Mingquan Yuan, Student, Peking University, China Semiconducting Carbon Nanotube as Gas Sensors Hamze Mousavi, Razi University, Iran

Monday, March 19, 2012 Function Room 4
Session III: Chemical and Biological Sensors Session chairs: Zhiyong Li ,Zheyao Wang


*8:45-9:10	Implement Smell and Taste with Nano-sensors
	Zhiyong Li, HP Labs, USA

*9:10-9:35	A Multifunctional CMOS Based Biosensor for Isolation, Characterization and Lysis for Circulating Tumor Cells
	Liesbet Lagae, IMEC and Catholic University Leuven, Belgium

*9:35-10:00	Realization a μPCR System and Its EC Detection Circuits
	Cangran Guo, Tsinghua University, China

10:00-10:30	Coffee Break

Session IV: Emerging MEMS and Sensor Technologies
Session chairs: Haizhou Yin ,Gregory Nielson
*10:30-10:55	Next Generation Photovoltaic Cells and Systems through MEMS Technology
	Gregory N. Nielson, Sandia National Laboratories, USA

*10:55-11:20	Novel MEMS Energy Harvesting System and Its Applications
	Haixia Zhang, Peking University, China
*11:20-11:45	Trace Detection of Energetic Substances Using Silicon Dioxide Microbridge-Based Micro-Calorimetric Sensors
	Zheyao Wang, Tsinghua University, China

11:45-12:00	ICAN, the Blossom of Novel MEMS Applications
	Haixia Zhang, Peking University, China

12:00-13:30	Lunch Break

Session V: MEMS Devices
Session chairs: Haixia Zhang , Horst Theuss


13:30-14:00	MEMS for Next-generation Micro-optics
	Hans Zappe, Department of Microsystems Engineering, University of Freiburg, Germany

*14:00-14:25	RF MEMS Switch and Its Applications
	Zewen Liu, Tsinghua University, China

*14:25-14:50	Nano Electro Mechanical Devices for Physical and Chemical Sensing
	Jean-Philippe Polizzi, CEA Leti, France

14:50-15:05	Effects of the Substrate on Piezoresistive Properties of Silicon Carbide Thin Films
	Mariana Amorim Fraga, Plasma and Processes Laboratory – Technological Institute of Aeronautics, Brazil

15:05-15:20	Coffee Break

Session VI: Sensor and MEMS Devices
Session chairs: Herb Huang ,Zewen Liu

*15:20-15:45	Well Aligned Single-walled Carbon Nanotube Film as a Building Block for MEMS/NEMS Devices
	Miao Lv, Xiamen University, China
*15:45-16:10	Study on a Low Power and High Efficiency Micro Heater Used for μPCR Chip
	Zewen Liu, Institute of Microelectronic, Tsinghua University, China
16:10-16:25	Study on Al-Ge Bonding and Quality Improvement in CMEMS Process
	Athics Gu, Semiconductor Manufacturing International Corp, China
16:25-16:40	Research on Silicon PIN Neutron Dose Detector
	Chao Fan, Peking University, China
16:40-16:55	A Stream-based Low Power Multi-channel Hebbian Eigenfilter for Neuro-physiological Sensor Spike Train Anaylsis
	Liang Peng, Institute of Microelectronics, Tsinghua University, China

16:55-17:00	Closing Remarks