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Symposium X: Advances in MEMS and Sensor Technologies

Symposium Chairs:

Qinghuang Lin

Chairman,IBM, USA


Satya Nitta


Manager, Research Straff Member, IBM T.J.Watson Research Center, USA


Herb Huang


Director,SMIC,China


Zhiyong Li


Principle Scientist,Hewlett-Packard Laboratories,USA


Zheyao Wang


Professor,Tsinghua University,China


Haizhou Yin


Professor,IME,CAS,China

 

   
(** to designate keynote talk, * to designate invite talk)

Sunday, March 18, 2012        Function Room 4

Session I: MEMS and Sensor Systems
Session Chairs:
Qinghuang Lin,  Hans Zappe

13:30-13:35

Chair's Opening Remark

 

   

 

**13:35-14:05

Internet of Things

 

 

Xiaowei Shen, IBM Research, China/USA

 

   

 

**14:05-14:35

How iNEMOs and High Performance Digital Microphones Will Enable New

Generation Smart Handheld Devices

 

 

Andrea Onetti, Senior Director of Audio & Sound Business Unit, STMicroelectronics, Italy

 


14:35-14:50


New Dynamics of the MEMS Inertial Sensor Market

 

 

Wenbin Ding,YOLE DEVELOPPEMENT, France

 


14:50-15:05


MEMS Technology and Market Trends – Change of Supply Chain and Business
Models, focus on MEMS Microphone

 

 

Wenbin Ding,YOLE DEVELOPPEMENT, France

 


15:05-15:20


Coffee Break

 


Session II: MEMS Integration

Session chairs: Satya Nitta, Liwei Lin

 


**15: 20-15:50


MEMS Packaging Challenges and Opportunities

Liwei Lin, UC Berkeley, USA

 

 

Horst Theuss,Infineon Technologies

*15: 50-16:15

Packaging for MEMS and Sensors - Challenges and Opportunities

Horst Theuss, Infineon Technologies, Germany

 
     

*16: 15-16:40

3D Integration using TSV technology

 
 

M. Juergen Wolf, Fraunhofer IZM, Germany

 

*16:40-17:05


Advance and Promise of CMOS-MEMS Manufacturing of Smaller Form Factor,
Lower Power and Lower Cost MEMS

 
 

Herb Huang, SMIC, China

 
       
       
Poster Session:

17:00-18:30

Fabrication of Thin Silicon PIN Detector

Xianshan Dong, Master, Peking University, China

 

Analysis and Optimization of GMR Based Current Sensors with Identical Pinning Orientation

Ma Weichao, Master candidate, Tsinghua University, China

 

Study on Infrared Absorption Characteristics of Ti and TiNx Nanofilms

Mingquan Yuan, Student, Peking University, China

 

Semiconducting Carbon Nanotube as Gas Sensors

Hamze Mousavi, Razi University, Iran

 

 

Monday, March 19, 2012        Function Room 4

Session III: Chemical and Biological Sensors
Session chairs: Zhiyong Li ,Zheyao Wang

 
   

*8:45-9:10

Implement Smell and Taste with Nano-sensors

 

Zhiyong Li, HP Labs, USA

   

*9:10-9:35

A Multifunctional CMOS Based Biosensor for Isolation, Characterization and Lysis for Circulating Tumor Cells

 

Liesbet Lagae, IMEC and Catholic University Leuven, Belgium

*9:35-10:00

Realization a μPCR System and Its EC Detection Circuits

 

Cangran Guo, Tsinghua University, China

   

10:00-10:30

Coffee Break

   

Session IV: Emerging MEMS and Sensor Technologies

Session chairs: Haizhou Yin ,Gregory Nielson


*10:30-10:55


Next Generation Photovoltaic Cells and Systems through MEMS Technology

 

Gregory N. Nielson, Sandia National Laboratories, USA

   

*10:55-11:20

Novel MEMS Energy Harvesting System and Its Applications

 

Haixia Zhang, Peking University, China

*11:20-11:45


Trace Detection of Energetic Substances Using Silicon Dioxide Microbridge-Based Micro-Calorimetric Sensors

 

Zheyao Wang, Tsinghua University, China

   

11:45-12:00

ICAN, the Blossom of Novel MEMS Applications

 

Haixia Zhang, Peking University, China

   

12:00-13:30

Lunch Break

Session V: MEMS Devices
Session chairs: Haixia Zhang , Horst Theuss

13:30-14:00

MEMS for Next-generation Micro-optics

 

Hans Zappe, Department of Microsystems Engineering, University of Freiburg, Germany

   

*14:00-14:25

RF MEMS Switch and Its Applications

 

Zewen Liu, Tsinghua University, China

   

*14:25-14:50

Nano Electro Mechanical Devices for Physical and Chemical Sensing

 

Jean-Philippe Polizzi, CEA Leti, France

   

14:50-15:05

Effects of the Substrate on Piezoresistive Properties of Silicon Carbide Thin Films

 

Mariana Amorim Fraga, Plasma and Processes Laboratory – Technological Institute of Aeronautics, Brazil

   

15:05-15:20

Coffee Break

   

Session VI: Sensor and MEMS Devices
Session chairs: Herb Huang ,Zewen Liu

*15:20-15:45


Well Aligned Single-walled Carbon Nanotube Film as a Building Block for MEMS/NEMS Devices

 

Miao Lv, Xiamen University, China


*15:45-16:10


Study on a Low Power and High Efficiency Micro Heater Used for μPCR Chip

 

Zewen Liu, Institute of Microelectronic, Tsinghua University, China


16:10-16:25


Study on Al-Ge Bonding and Quality Improvement in CMEMS Process

 

Athics Gu, Semiconductor Manufacturing International Corp, China


16:25-16:40


Research on Silicon PIN Neutron Dose Detector

 

Chao Fan, Peking University, China


16:40-16:55

 


A Stream-based Low Power Multi-channel Hebbian Eigenfilter for Neuro-physiological Sensor Spike Train Anaylsis

 

Liang Peng, Institute of Microelectronics, Tsinghua University, China

 

16:55-17:00

Closing Remarks

   
   

 

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