首页   :    半导体技术大会 :    论文征集/投稿



Symposium X:Advances In MEMS and Sensor Technologies


Symposium Committee

Dr. Qinghuang Lin
Chair

IBM T. J. Watson Research Center, USA

Dr. Satya Nitta
Co-Chair

IBM, USA

Dr. Haixia (Alice) Zhang
Co-Chair

Institute of Microelectronics of Peking University,China

Dr. Thomas Gessner
Member

Fraunhofer Institute for Electronic Nano Systems ENAS Chemnitz, Germany

Dr. Herb Huang
Member

SMIC, China

Dr.Zheyao Wang
Member

Tsinghua University, China

Dr. Haizhou Yin
Member

IME, CAS, China

Dr. Zhiyong Li
Member

Hewlett-Packard Laboratories, USA

Dr. Hans Zappe
Member

University of Freiburg, Germany

Symposium X: Advances in MEMS and Sensor Technologies

  •  MEMS Systems and Sensor Network
    -         Market and technology trends of MEMS and sensor network
    -         System integration of MEMS devices and sensors
    -         Heterogeneous integration of MEMS and sensor components with processors and memory
    -         Sensor networks
    -         Wearable systems for healthcare, fitness and wellness and infotainment
    -      Atmospheric Particulate Matter (PM) Monitoring Systems
    -      MEMS and sensor data storage, processing and communication, including security and privacy
    -      Applications of cloud technology in MEMS and sensors

  • MEMS and Sensor Design
    -      EDA tool and methodologies 
    -        Design for manufacturability, reliability and testability

  • Wearables
    -      Blood Pressure Monitors
    -      Drug Delivery Devices
    -      Electronic Patches
    -      Fitness & Heart Rate Monitors
    -      Glucose Monitors
    -      Smart Eyewear (Contact Lens and Glasses)
    -      Smart Watches

  •  MEMS Devices and Sensors
    -         Accelerometers, Gyroscopes, Microactuators
    -         Chemical and biological sensors
    -         CMOS image sensors
    -         CMOS image sensors
    -         Humidity & temperature sensors
    -         Inkjets
    -         Microfluidics
    -         Microphones, Compasses, Micromirrors 
    -         Pressure sensors
    -         Radio Frequency Identification (RFID)
    -         RF-MEMS, Optical MEMS

  •  Materials and Process technologies
    -          Thin films, III-V compound semiconductors
    -          New functional materials
    -          Patterning materials
    -          Lithography and new patterning processes
    -          Deep reactive ion etching
    -          Wet etch, plating and CMP
    -          Novel materials and processes

  •  Emerging MEMS Devices and Sensors
    -          MEMS-based post-CMOS devices
    -         Organic MEMS and BioMEMS
    -          MEMS for DNA sequencing
    -       MEMS for drug delivery
    -       MEMS and sensor devices for energy harvesting, storage and delivery
    -       Detection and monitoring of water quality, environment and safety


  •  Packaging, Testing and Reliability of MEMS Devices and Sensors

  •  Applications of MEMS Devices and Sensors
    -          Automotive
    -         Smart phones
    -          Handheld gaming devices and consoles
    -          Chemical and biomedical applications
    -          Healthcare and wellness
    -         Sensor network
    -          Applications of MENS and sensors in energy, environment and safety

 

沪ICP备06022522号