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Symposium X:Advances In MEMS and Sensor Technologies


Symposium Committee

Dr. Qinghuang Lin
Chair

IBM T. J. Watson Research Center, USA

Dr. Satya Nitta
Co-Chair

IBM, USA

Dr. Haixia (Alice) Zhang
Co-Chair

Institute of Microelectronics of Peking University,China

Dr. Thomas Gessner
Member

Fraunhofer Institute for Electronic Nano Systems ENAS Chemnitz, Germany

Dr. Herb Huang
Member

SMIC, China

Dr.Zheyao Wang
Member

Tsinghua University, China

Dr. Haizhou Yin
Member

IME, CAS, China

Dr. Zhiyong Li
Member

Hewlett-Packard Laboratories, USA

Dr. Hans Zappe
Member

University of Freiburg, Germany

Symposium X: Advances in MEMS and Sensor Technologies

  •  MEMS Systems and Sensor Network
    -         Market and technology trends of MEMS and sensor network
    -         System integration of MEMS devices and sensors
    -         Heterogeneous integration of MEMS and sensor components with IC
    -         Sensor networks
    -         Internet of Things

  •  MEMS Devices and Sensors
    -          Radio Frequency Identification (RFID)
    -         Accelerometers
    -         Gyroscopes
    -         CMOS image sensors
    -         Pressure sensors
    -         RF-MEMS
    -         Optical MEMS
    -         Microphones
    -         Microactuators
    -         Compasses
    -         Microfluidics
    -         Inkjets
    -         Micromirrors
    -         Chemical and biological sensors
    -         Humidity & temperature sensors

  •  Materials and Process technologies
    -          Thin films, III-V compound semiconductors
    -          New functional materials
    -          Patterning materials
    -          Lithography and new patterning processes
    -          Deep reactive ion etching
    -          Wet etch, plating and CMP
    -          Novel materials and processes

  •  Emerging MEMS Devices and Sensors
    -          MEMS-based post-CMOS devices
    -          Organic MEMS
    -          BioMEMS
    -          MEMS for DNA sequencing
    -       MEMS and Sensors for Brain Mapping
    -       MEMS for drug delivery
    -       Flexible MEMS and Sensors
    -       MEMS and sensor devices for energy harvesting, storage and delivery
    -       Detection and monitoring of water quality, environment and safety


  •  Packaging, Testing and Reliability of MEMS Devices and Sensors

  •  Applications of MEMS Devices and Sensors
    -          Automotive
    -         Smart phones
    -          Handheld gaming devices and consoles
    -          Chemical and biomedical applications
    -         Sensor network
    -          Applications of MENS and sensors in energy, environment and safety

 

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