Abstract Template

Abstract Deadline: October 22, 2012

Manuscript Deadline: December 16, 2012

Welcome to CSTIC 2013, one of the largest and the most comprehensive annual semiconductor technology conferences in China. CSTIC is organized by SEMI and ECS, co-organized by China's High-Tech Expert Committee (CHTEC). It is co-sponsored by IEEE-EDS, MRS and China Electronics Materials Industry Association. CSTIC 2013 will be held on March 17-18, 2013 in Shanghai, China, in conjunction with SEMICON China 2013. It will cover all the aspects of semiconductor technology and manufacturing, including devices, design, lithography, integration, materials, processes, manufacturing as well as emerging semiconductor technologies and silicon material applications. Hot topics, such as 3D integration, III-V semiconductors, carbon nanoelectronics, LEDs, and MEMS, will also be included in the conference.

We are soliciting papers from authors around the world on all aspects of semiconductor technology and manufacturing, including semiconductor design, Frond-End-of-the-Line (FEOL), Back-End-of-the-Line (BEOL), packaging, testing, as well as emerging semiconductor technologies.

Symposium I: Device Engineering and Technology

Symposium II: Lithography and Patterning

Symposium III: Dry & Wet Etch and Cleaning

Symposium IV: Thin Film Technology

Symposium V: CMP, Wafer Substrate Polishing and Post-Polish Cleaning

Symposium VI: Materials and Process Integration for Device and Interconnection

Symposium VII: Packaging and Assembly

Symposium VIII: Metrology, Reliability and Testing

Symposium IX: Emerging Semiconductor Technologies

Symposium X: Advances in MEMS and Sensor Technologies

Symposium XI: Circuit Design, System Integration and Applications

CSTIC is intended to be a premier annual international conference on semiconductor technology and manufacturing in China. It aims to provide a platform for executives, managers, engineers and researchers to exchange the latest developments in semiconductor technology and manufacturing. It also offers opportunities for those who are interested in investing and collaboration in the semiconductor industry in Asia, particularly in China.

Prospective authors are requested to submit an abstract of 200-500 words and a 100-word biography by October 22, 2012. The abstract must clearly describe the nature, scope, content, organization, key points and significance of the proposed paper, using the templates on the CSTIC website.

Presentations are to be original, non-commercial in that they focus on the technical merits of a design, a method, a structure, an integration scheme, a material or a process rather than on the individual company’s products and their benefits. All abstracts will be reviewed by CSTIC committees. Accepted papers will be notified no later than November 1, 2012.

Manuscripts of accepted papers which should be about six pages in length, including diagrams, figures, and photographs, are to be submitted electronically via the ECS Transaction website. The deadline for manuscript submittal is December 15, 2012. English oral presentation materials are required by February 10, 2013. After peer reviews, accepted manuscripts will be published in the ECS Transactions. They are subject to co-copyright with ECS and SEMI who reserve the rights to republish, re-sell, and display the submitted materials in whole or in part.

Outstanding papers will be recommended for publication in a peer-reviewed, reputable international journal.

ECS Best Student Paper Awards and SEMI Best Young Engineer Paper Awards will be presented during the conference to recognize outstanding scientific and/or engineering work in fundamental or applied semiconductor technologies by a student or a young engineer in the world, particularly in China. Three awards will be presented in each of the two categories: student awards and young engineer/scientist awards. The nominee must be a graduate student or a young scientist or a young engineer who is the primary author of the paper to be presented at the CSTIC conference. The age of the nominee generally should be younger than 35. Besides the technical paper, the Award candidates are required to submit to the Award Committee documentation of the nominee’s accomplishments including a list of publications, patents, professional and educational experiences and a brief support letter before January 30, 2013. The Award winners will be selected by the SESEA Award Committee based on the technical merits of the submitted papers and the supporting materials.

CSTIC Best Poster Awards will be given to best posters presented at the conference to recognize outstanding scientific and/or engineering work in fundamental or applied semiconductor technologies by any authors in the world, particularly in China. Three awards will be presented in this category. The nominee must be a graduate student or a young scientist or a young engineer who is the primary contributor of the paper to be presented at the CSTIC conference.  All poster papers will be eligible for consideration of these CSTIC Best Poster Awards. The Award winners will be selected by the SESEA Award Committee based on the technical merits of the submitted papers and visual presentation of the posters.

Please visit http://semiconchina.semi.org/cstic for detailed information.

Contact: Kevin Wu, SEMI China Phone: 86.21.6027.8558 Fax: 86.21.6027.8511 E-mail: kwu@semi.org

            Xianwei Xin, SEMI China Phone: 86.21.6027.8556 Fax: 86.21.6027.8511 E-mail: xwxin@semi.org