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+86.21.6027.8500
Chinese
2020年6月27-29日
上海新国际博览中心

Dr. Wei Fang

Dr. Wei Fang

Senior director, ASML HMI
San, Jose, California, CA


Dr. Wei Fang is senior director of ASML and head of algorithm application development of HMI. He joined Hermes Microvision Inc from 2001 and having more than eighteen years e-beam inspection development experience.

Dr. Wei Fang received BSEE and Phd degree from Tsinghua University on 1989 and 1994. Before he joined HMI, he had 5 year research fellow experience at Nanyang Technological university in Singapore. In HMI, he led image algorithm team to develop e-beam inspection algorithm. Specially he bring D2DB inspection technology into e-beam inspection system which changed e-beam inspection marketing. Currently he worked as head of advanced algorithm and technology in HMI to lead e-beam inspection into a new era. Dr. Fang has over 50 US patents and over 20 publications on e-beam inspection system, algorithm and SEM metrology area.