Dr. Chao-Chang Arthur Chen

Professor Chao-Chang A. Chen obtained his M.S. I.E. and Ph.D. M.E. degrees from University of Wisconsin, Madison, USA in 1991 and 1994, respectively. As Chairman of the Department of Mechanical Engineering and Distinguished Professor at National Taiwan University of Science and Technology (NTUST), Dr. Chen establishes the CMP Innovation Center, CIC in 2013 and also works as the Director of CIC. He was also appointed as a Visiting Researcher at Manufacturing Technology Center, TSMC, Hsinchu Taiwan during March to July, 2015. Professor Chen’s research interests include the areas of wafer and film processing with CMP, precision molding of optical elements with micro structures, and manufacturing analysis. Professor Chen has received over 20 patents and invited as a guest editor of the Journal of Materials Processing Technology (Sep. 2003) and co-editor of the Advances in Abrasive Technology XIII, Advanced Materials Research (Sep. 2010). Professor Chen also served as the Academic Program Chair of the International Conference of Planarization/Polishing Technology (ICPT) 2008 and the Conference Chairman of ICPT 2013. At present, Professor Chen serves as President of the CMP User Group, Taiwan (CMPUG_Taiwan), President of the Taiwan Society of Abrasive Technology (TSAT) and the SEMI Taiwan IC Committee Member. He also received SME President Award in 2015 and SEMI Taiwan Merit Award in 2013 and SEMI Taiwan Standard Contribution Award in 2016.