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Chinese
2018年3月14-16日
上海新国际博览中心

Dr. Kaidong Xu

Dr. Kaidong Xu
IMEC, Belgium

Kaidong Xu is currently the manager of plasma etch at IMEC vzw, Leuven, Belgium, responsible for overall etch strategy, research and development, focusing on CMOS scaling. Prior to joining IMEC, he was senior process manager of wet applications at SEZ/Lam Research, from 2004 to 2010. Prior to that, he did research at IMEC on surface preparation and wet cleans, from 1999 to 2004. He has published over 80 papers in international journals and conferences. He received his BSc in chemistry from Peking University in China, and his Ph.D. in chemistry from University of Leuven (KU Leuven) in Belgium.