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2018年3月14-16日
上海新国际博览中心

Dr. Denis Shamiryan

Dr. Denis Shamiryan
IMEC, Belgium

Denis Shamiryan received MSc degree from Novosibirsk State Technical University in Russia in 1996. In 2004 he received his PhD degree from Catholic University of Leuven, Belgium. He has more than 10 years of experience in plasma etching, all with imec, Belgium, working with etching of shallow and deep trench isolation, high-k, metal gates and studying plasma damage of low-k dielectrics. He authored and co-authored around 50 journal papers and 70 conference contributions, as well as 7 patents. In 2007 he established and since then chairs annual European workshop on plasma etch and strip in microelectronics (PESM). Currently he holds a position of Senior Scientist of the Dry Etch group at imec, Belgium. His main area or responsibilities are advanced plasma etch processes and spectroscopic ellipsometry.