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Chinese
2018年3月14-16日
上海新国际博览中心

Dr. Hanming WU

Dr. Hanming WU
SMIC, China

He earned PhD from Chinese Academy of Sciences in 1987, and post-doc in UC-Berkeley. More than 20 years industry experience in plasma application in semiconductor processes, including Novellus Systems, Intel Corp and SMIC. Along with 80 published papers, more than 42 granted and pending granted patents in semiconductor processes are to his credit. He has some experience of giving lectures at top universities in USA. Some of research results have been included in the textbook in USA.

Since 2001, he has joined and led the pre-study of technology development from 0.18um to 32nm node. As a director of Component Research with SMIC, he is now in charge of 32nm research program. Besides, he is a joined guest professor of Fudan University and Xi'An University of Electronics, Research Professor with Institute of Physics, member of technical board with Institute of Microelectronics, Chinese Academy of Sciences. In 2008, he earned the 2nd class award of National Science and Technology Progress.