|
Anthony Barker PVD Product Manager, SPTS Technologies PVD产品经理 |
|
个人简介 / Biography Dr Anthony Barker joined Surface Technology Systems (STS) in 1997 as Etch Process Engineer. He went on to manage STS’ non-Si based etch and deposition process groups. After leaving STS he joined Trikon as Etch Process Engineer in 2005, which became Aviza Technology and then merged with STS to form SPTS Technologies in 2009. Most recently Anthony worked as Principal Process Engineer in R&D Accounts group before joining SPTS's PVD Product Management team in May 2017. Before STS, Anthony worked as Thin Film Process Engineer at Gems Sensors. Dr Barker has a B.Eng Honours degree in Materials Engineering and a Ph.D in Electronic Materials in association with Rolls Royce, both from Swansea University. 摘要 / Abstract Increasing demand for high voltage operating devices, particularly the growth in electric vehicles, has led to growing adoption of SiC and GaN based power devices. Despite continued competition from Si based power devices, high efficiency, resistance to harsher environments and fast switching times make SiC MOSFETs an ideal choice for electric traction. We will discuss how physical vapor deposition (PVD) can be used to deposit both thick frontside metal, and thinner multi-layer backside metals deposited after wafer thinning. The presentation will give details of how SPTS Sigma® PVD technology overcomes various challenges which can affect yields in power device manufacturing, including eliminating whiskers during thick metal deposition, avoiding contamination from organics, active-face protection and stress control of backside layers. |
|
