|
International Advisory Committee Members
|
|
|
|
|
|
|
Dr. Minhwa Chi
Co-Chair
SVP/TD, SiEn (Qingdao) Integrated Circuits
|
|
Dr. Philip Wong
Co-Chair
Professor, Stanford University, USA
|
|
|
|
|
|
|
Dr. Georg Bednorz
Member
IBM Fellow, Nobel Laureate, Switzerland
|
|
Dr. Qingyuan Han
Member
Hans Consulting International, USA
|
|
|
|
|
|
|
Dr. Kinam KIM
Member
Vice Chairman & CEO, Samsung Electronics, Korea
|
|
Mrs. Ying Shi
Member
ICMTIA, China
|
|
|
|
|
|
|
Dr. Hailing Tu
Member
GRINM, China
|
|
Dr. Shichang Zou
Member
Chinese Academy of Sciences, China
|
|
|
|
|
|
|
Dr. Edward Y. Chang
Member
National Chiao Tung University, Taiwan, China
|
|
Dr. Shaojun WEI
Member
Professor, Tsinghua Universtiy, China
|
|
|
|
|
|
|
Dr. Chenming HU
Member
Professor, UC Berkeley, USA
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Steering Committee Advisors
|
|
|
|
|
|
|
Mr. Lung Chu
President，SEMI China
Vice President，SEMI
|
|
Dr. Hanming Wu
Member
Dean of the School of Micro-nano-Electronics, Zhejiang University, China
|
|
|
|
|
|
|
Dr. Hiroshi IWai
Member
Tokyo Institute of Technology, Yokohama, Japan
|
|
Dr. Tomi T. Li
Member
National Taiwan Central University
|
|
|
|
|
|
|
|
|
|
|
|
Conference Executive Committee Members
|
|
|
|
|
|
|
Dr. Beichao Zhang
Conference Chair,
VP of Hangzhou HFC, China
|
|
Prof. Bin Yu
Symp-X Chair, Conference Executive Co-Chair,
Professor, Zhejiang University, China
|
|
|
|
|
|
|
Prof. Ru Huang
Symp-I Chair, Conference Co-Chair
Professor and President, Southeast University, China
|
|
Dr. Cor Claeys
Conference Co-Chair and Award Selection Chair
Professor, KU Leuven, Belgium
|
|
|
|
|
|
|
Dr. Linyong (Leo) Pang
Symp-II Chair
VP, D2S Inc., USA
|
|
Dr. Ying ZHANG
Symp-III Chair
Consultant
|
|
|
|
|
|
|
Dr. Xiaoping Shi
Symp-IV Chair
CTO, Beijing Naura Microelectronics, China
|
|
Dr. Xinping Qu
Symp-V Chair
Professor, Fudan University, China
|
|
|
|
|
|
|
Dr. Xiaowei Li
Symp-VI Chair
Deputy Director, ICT, CAS, China
|
|
Dr. Steve X. Liang
Symp-VII Chair
|
|
|
|
|
|
|
Prof. Jianshi Tang
Symp-VIII Chair
Tsinghua University, China
|
|
Prof. Weikang Qian
Symp-IX Chair
Associate Professor, University of Michigan-Shanghai Jiao Tong University Joint Institute, China
|
|
|
|
|
|
|
Dr. Hsiang-Lan Lung
Poster Chair
Director MXIC, Taiwan, China
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Symposium I: Device Engineering and Technology
|
|
|
|
|
|
|
|
Prof. Ru Huang
Chair
Southeast University, China
|
|
Dr. Cor Claeys
Co-Chair
KU Leuven, Belgium
|
|
|
|
|
|
|
|
Dr. Minhwa Chi
Co-Chair
SiEn (Qindao) Integrated Circuits Co.
|
|
Dr. Chung Lam
Co-Chair
Jiangsu Advanced Memory Technology Co. Ltd., China
|
|
|
|
|
|
|
Prof. Jong-Ho Lee
Co-Chair
Seoul National University, Korea
|
|
Prof. Ming Liu
Co-Chair
Fudan University, China
|
|
|
|
|
|
|
Prof. Yuchao Yang
Co-Chair
Peking University, China
|
|
Dr. Wensheng Qian
Member
HHGrace
|
|
|
|
|
|
|
Dr. Huiling Shang
Member
TSMC
|
|
Dr. Zhiqiang Wei
Member
Avalanche Technology
|
|
|
|
|
|
|
Dr. Hong Wu
Member
Technology R&D, SMIC, China
|
|
Prof. Huaqiang Wu
Member
Microelectronics, Tsinghua University, Beijing, China
|
|
|
|
|
|
|
Dr. Frank Bin Yang
Member
Qualcomm, USA
|
|
Prof. Mario Lanza
Member
the King Abdullah University of Science and Technology (KAUST), Saudi Arabia
|
|
|
|
|
|
|
Prof. Xinran Wang
Member
Nanjing University, China
|
|
Prof. Qianqian Huang
Member
Peking University, China
|
|
|
|
|
|
|
Prof. Peng Zhou
Member
Fudan University, China
|
|
Prof. Bin Yu
Member
Zhejiang University, China
|
|
|
|
|
|
|
Prof. Ming He
Member
Peking University, China
|
|
|
|
|
|
|
|
Symposium II: Lithography and Patterning
|
|
|
|
|
|
|
|
Dr. Linyong (Leo) Pang
Chair
D2S Inc., USA
|
|
Dr. Kafai Lai
Co-Chair
IBM T.J. Watson Research Center, USA
|
|
|
|
|
|
|
Dr. Qiang Wu
Co-Chair
Fudan University
|
|
Dr. George Lu
Co-Chair
DuPont
|
|
|
|
|
|
|
Prof. Yayi Wei
Member
IMECAS, China
|
|
Mr. Xiaoming Ma
Member
Suzhou Runbang semiconductor material technology Co., Ltd
|
|
|
|
|
|
|
Dr. Zhimin Zhu
Member
Brewer Science, USA
|
|
Dr. Zhibiao Mao
Member
Nata Chemicals
|
|
|
|
|
|
|
Mr. Motokatsu Imai
Member
Mito Kogyo CO., LTD, Japan
|
|
Dr. Hai Deng
Member
Fudan University, China
|
|
|
|
|
|
|
Dr. Shiyuan Liu
Member
Huazhong University of Science and Technology , China
|
|
Dr. Wang Yueh
Member
Intel, USA
|
|
|
|
|
|
|
Dr. Ban-Ching Ho
Member
Nissan Chemicals
|
|
Dr. Yuyang Sun
Member
Photronics
|
|
|
|
|
|
Dr. David H. Wei
Member
ASML Brion
|
|
Dr. Chris Progler
Member
Photronics
|
|
|
|
|
|
Dr. Weimin Gao
Member
ASML
|
|
Mr. Wenzhan Zhou
Member
Shanghai Huali Microelectronics Corp
|
|
|
|
|
|
|
Symposium III: Dry &Wet Etch and Cleaning
|
|
|
|
|
|
|
|
Dr. Ying ZHANG
Chair
Consultant
|
|
Dr. Maxime Darnon
Co-Chair
French Institute for Scientific Research (CNRS), France
|
|
|
|
|
|
|
Dr. Tom Ni
Co-Chair
AMEC, China
|
|
Mr. Jinrong Zhao
Member
Naura, China
|
|
|
|
|
|
|
Dr. Steven Zhang
Member
SMIC, China
|
|
Dr. Kaidong Xu
Member
Leuven Instruments, China
|
|
|
|
|
|
|
Dr. Ying Huang
Member
Applied Material, China
|
|
Dr. Huiyuan Pei
Member
Lam Research, China
|
|
|
|
|
|
|
Dr. Kevin Zhou
Member
Naura, China
|
|
Dr. Ying Xiao
Member
TEL, China
|
|
|
|
|
|
|
Dr. Jianping Zhao
Member
TEL, USA
|
|
Dr. Richard Yang
Member
Fortune Precision Equipment, China
|
|
|
|
|
|
Mr. Hai Cong
Member
Advanced Micro-Fabrication Equipment Inc. (AMEC), China
|
|
|
|
|
|
|
|
|
Symposium IV: Thin film, Plating and Process Integration
|
|
|
|
|
|
|
|
Dr. Xiaoping Shi
Chair
Beijing Naura Microelectronics, China
|
|
Dr. Zhen Guo
Co-Chair
Microsoft, USA
|
|
|
|
|
|
|
|
Dr. Beichao Zhang
Co-Chair
VP of Hangzhou HFC, China
|
|
Dr. Chao Zhao
Co-Chair
Beijing Superstring Academy of Memory Technology (SAMT), China
|
|
|
|
|
|
|
Dr. Huang Liu
Co-Chair
HFC Semiconductor
|
|
Dr. Jiang Yan
Co-Chair
North China University of Technology, China
|
|
|
|
|
|
|
Dr. Chih-Chao Yang
Co-Chair
IBM Research
|
|
Dr. Ran Liu
Member
Fudan University, China
|
|
|
|
|
|
|
Prof. Yu-Long Jiang
Member
Fudan University, Shanghai
|
|
Dr. Li-Qun Xia
Member
Applied Materials, USA
|
|
|
|
|
|
|
Dr. Jianhua Ju
Member
HFC Semiconductor
|
|
Dr. Ganming Zhao
Member
Mattson
|
|
|
|
|
|
|
Dr. Larry Zhao
Member
Applied Materials, USA
|
|
Dr. Jiaxiang Nie
Member
Leadmicro, China
|
|
|
|
|
|
|
Dr. Xun Gu
Member
ASM
|
|
Dr. Sean Chang
Member
PIOTECH
|
|
|
|
|
|
|
Dr. Heng Tao
Member
AMEC, China
|
|
Dr. Chenyu Wang
Member
Applied Materials, China
|
|
|
|
|
|
|
Symposium V: CMP and Post CMP Cleaning
|
|
|
|
|
|
|
|
Dr. Xinping Qu
Chair
Fudan University, China
|
|
Dr. Yuchun Wang
Co-Chair
Anji Microelectronics, China
|
|
|
|
|
|
|
Dr. Jingxun Fang
Co-Chair
Huali Microelectronics Corporation, China
|
|
Dr. Jin-Goo Park
Member
Hanyang University, Korea
|
|
|
|
|
|
|
Dr. Shoutian Li
Member
Anji Microelectronics, China
|
|
Dr. XinChun Lu
Member
Tsinghua University, China
|
|
|
|
|
|
|
|
|
|
|
|
Dr. Chao-Chang Arthur Chen
Member
NTUST, Taiwan, China
|
|
Dr. Baoguo Zhang
Member
Hebei University of Technology, China
|
|
|
|
|
|
|
Dr. Yonggen He
Member
GrandiT Co., Ltd., China
|
|
Dr. Jie Cheng
Member
China University of Mining and Technology-Beijing
|
|
|
|
|
|
|
Symposium VI: Metrology, Reliability and Testing
|
|
|
|
|
|
|
|
Dr. Xiaowei Li
Chair
Deputy Director, ICT, CAS, China
|
|
Dr. Peilin Song
Co-Chair
IBM, USA
|
|
|
|
|
|
|
Dr. Frank Feng
Member
Synopsys
|
|
Dr. Yiping Xu
Member
Raintree Technologies Corp
|
|
|
|
|
|
|
Dr. Yuhua Cheng
Member
Peking University, China
|
|
Dr. Francis Jen
Member
KLA Tencor, China
|
|
|
|
|
|
|
Dr. Kelvin Xia
Member
Huatek, China
|
|
Dr. Srinivas Raghvendra
Member
Synopsys, USA
|
|
|
|
|
|
|
Dr. Yu Huang
Member
Mentor Graphics, USA
|
|
Dr. Jian-fu Zhang
Member
Liverpool John Moores University, England
|
|
|
|
|
|
|
Dr. Houken Tseng
Member
Teradyne, Greater China, China
|
|
Dr. Yu Zhu
Member
Jiangsu Advanced Memory Semiconductor (AMS) Co., Ltd.
|
|
|
|
|
|
|
Dr. Tung-Yang Chen
Member
AIP Technology Corporation, Taiwan, China
|
|
Dr. Jianuo Shi
Member
KLA Corporation
|
|
|
|
|
|
Symposium VII: Packaging and Assembly
|
|
|
|
|
|
|
|
Dr. Steve X. Liang
Chair
|
|
Prof. Xing Wu
Co-Chair
East China Normal University
|
|
|
|
|
|
|
Dr. Yifan Guo
Co-Chair
Yibu Semiconductor
|
|
Dr. Huili Fu
Co-Chair
|
|
|
|
|
|
|
Dr. Mark Huang
Member
Shenzhen University, China
|
|
Prof. Mingliang Huang
Member
Dalian University of Technology, China
|
|
|
|
|
|
|
Prof. Kuan-Neng Chen
Member
National Chiao Tung University
|
|
Dr. Shin-Puu Jeng
Member
TSMC
|
|
|
|
|
|
|
Prof. Wenhui Zhu
Member
Central South University
|
|
Mr. John Rowland
Member
Spreadtrum
|
|
|
|
|
|
|
Dr. John Yuanlin Xie
Member
Altera Corp., CA, USA
|
|
Dr. Roy Yu
Member
IBM, Watson Research Center, USA
|
|
|
|
|
|
|
Dr. Yishao Lai
Member
ASE. Taiwan, China
|
|
Dr. Jing Shi
Member
Oracle, USA
|
|
|
|
|
|
|
Dr. Young Do Kweon
Member
Samsung, Korea
|
|
Dr. Renzhe Zhao
Member
Huawei, China
|
|
|
|
|
|
|
|
Dr. Hong SHI
Member
Xilinx
|
|
Dr. Tim Bao
Member
Air Products and Chemicals, Inc
|
|
|
|
|
|
|
Dr. Tim Chen
Member
Yantai Darbond Technology Co., Ltd.
|
|
Dr. Daniel Lu
Member
Henkel
|
|
|
|
|
|
|
Dr. Wang Su
Member
Shanghai Sinyang Semiconductor Materials
|
|
Prof. Horng-Show (Frank) Koo
Member
University into Taipei University of Marine Technology (TUMT)
|
|
|
|
|
|
|
Dr. Daquan Yu
Member
Xiamen Sky Semiconductor Co., Ltd.
|
|
Dr. Minghai Wang
Member
Bonotec Electronic Materials
|
|
|
|
|
|
|
Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies
|
|
|
|
|
|
|
|
|
|
Prof. Jianshi Tang
Co-Chair
Tsinghua University, China
|
|
|
|
|
|
|
Prof. Hyungjun Kim
Co-Chair
Yonsei University, South Korea
|
|
Dr. Hsiang-Lan Lung
Co-Chair
Macronix International Ltd., Hsinchu, Taiwan, China
|
|
|
|
|
|
|
Dr. Zhiyong Ma
Co-Chair
Intel
|
|
Prof. Jingwei Bai
Member
Tsinghua University, China
|
|
|
|
|
|
|
Prof. Edward Y. Chang
Member
National Chiao Tung University, Taiwan, China
|
|
Dr. Kangguo Cheng
Member
IBM, USA
|
|
|
|
|
|
|
Prof. Jinn P. Chu
Member
National Taiwan University of Science and Technology, China
|
|
Prof. Thomas Otto
Member
Fraunhofer Institute for Electronic Nano Systems ENAS, Chemnitz, Germany
|
|
|
|
|
|
|
Prof. Zheyao Wang
Member
Tsinghua University, China
|
|
Prof. Daniele Lelmini
Member
Politecnico Di Milano, Italy
|
|
|
|
|
|
|
Prof. Wei Wang
Member
Peking University, China
|
|
Prof. Haifang Jian
Member
Institute of Semiconductor, Chinese Academy of Sciences, China
|
|
|
|
|
|
|
Dr. Wang Yueh
Member
Intel, USA
|
|
Prof. Zhen Zhang
Member
Uppsala University, Sweden
|
|
|
|
|
|
|
Dr. Chang CHEN
Member
SITRI, China
|
|
Mr. Allen Liu
Member
IMEC, Belgium
|
|
|
|
|
|
|
Dr. Alex Gu
Member
Shanghai University and SITRI, China
|
|
Dr. Chen Wang
Member
Tsinghua University, China
|
|
|
|
|
|
|
Symposium IX: Design and Automation of Circuits and Systems
|
|
|
|
|
|
|
|
Prof. Weikang Qian
Chair
University of Michigan-Shanghai Jiao Tong University Joint Institute, China
|
|
Prof. Pingqiang Zhou
Co-Chair
Shanghai Tech University
|
|
|
|
|
|
|
Dr. Wen‐Hu Zhao
Co-Chair
Jiangsu Industrial Technology Research Institute, China
|
|
Prof. Xunzhao Yin
Co-Chair
Zhejiang University
|
|
|
|
|
|
|
Prof. Le Ye
Member
Peking University, China
|
|
Prof. Wenjian Yu
Member
Tsinghua University, China
|
|
|
|
|
|
|
Prof. Yiyu Shi
Member
University of Notre Dame, USA
|
|
Dr. Jinjun Xiong
Member
IBM T.J. Watson Research Center, USA
|
|
|
|
|
|
|
Prof. Yu-Guang Chen
Member
Yuan-Ze University, Taiwan, China
|
|
Prof. Baoyong Chi
Member
Tsinghua University, China
|
|
|
|
|
|
|
Prof. Yinhe Han
Member
Chinese Academy of Science, China
|
|
Li Li
Member
Synopsys Inc., Shanghai
|
|
|
|
|
|
|
|
Dr. Bing Li
Member
Technical University of Munich, Germany
|
|
Prof. Shaojun Wei
Member
Tsinghua University, China
|
|
|
|
|
|
|
|
Prof. Xiaoyang Zeng
Member
Fudan University
|
|
Prof. Chuan Zhang
Member
Southeast University
|
|
|
|
|
|
|
Dr. Jianli Chen
Member
Fuzhou University
|
|
Dr. Changhao Yan
Member
Fudan University
|
|
|
|
|
|
|
Dr. Haibao CHEN
Member
Shanghai Jiaotong University
|
|
Dr. Jun TAO
Member
Fudan University
|
|
|
|
|
|
|
Dr. Zhufei CHU
Member
Ningbo University
|
|
He Li
Member
Southeast University
|
|
|
|
|
|
|
Dr. Aili WANG
Member
Zhejiang University, China
|
|
|
|
|
|
|
|
|
Symposium X: AI & IC Manufacturing
|
|
|
|
|
|
|
|
Prof. Bin Yu
Chair
Zhejiang University, China
|
|
Prof. Cheng Zhuo
Co-Chair
Zhejiang University, China
|
|
|
|
|
|
|
Prof. Jinfeng Kang
Co-Chair
Peking University
|
|
Prof. Feng Miao
Member
Nanjing University, China
|
|
|
|
|
|
|
Prof. Ye Lu
Member
Fudan University, China
|
|
Dr. Zhiqiang Su
Member
XTX Technology Inc., China
|
|
|
|
|
|
Dr. Genquan Han
Member
Xidian University, China
|
|
Dr. Tawfique Hasan
Member
University of Cambridge, UK
|
|
|
|
|
|
Prof. Bin Gao
Member
Tsinghua University, China
|
|
Prof. Feng Zhang
Member
Institute of Microelectronics of Chinese Academy of Sciences, China
|
|
|
|
|
|
Dr. Yu Han
Member
Empyrean Technology Co. LTD.
|
|
Dr. Liu Hongjie
Member
Shenzhen Reexen Technology Co., Ltd.
|
|
|
|
|
|
Prof .Yang Chai
Member
Hong Kong Polytechnic University
|
|
Dr. Zhenyu Huang
Member
Intel Dalian
|
|
|
|
|
|
Prof. Yang Xu
Member
Zhejiang University
|
|
Prof. Chang Gao
Member
Technische Universiteit Delft, Netherlands
|
|
|
|
|
|
Dr. Zhiliang Xia
Member
Yangtze Memory Technology Co., Ltd
|
|
Dr. Ni Dong
Member
Zhejiang University
|
|
|
|
|
|
|
Prof. John Paul Strachan
Member
Forschungszentrum Jülich and RWTH Aachen University
|
|
Dr. Zhu Yao
Member
Institute of Microelectronics (IME), A*STAR Singapore
|
|
|
|
|
